Bayani

Semiconductor masana'antu masana'antu, nanotechnology cibiyoyin, nano masana'antu da sauran daidaitaccen masana'antu da kuma bincike cibiyoyin sau da yawa hada tsabtace dakuna tare da aiki karya ƙasa tsarin saduwa da hadaddun kayan aiki bukatun (bututun, kebul, gas bututun da sauransu) da kuma kiyaye tsabtace tsabtace ka'idoji. Wannan ƙasa ba ta dace da kayan aikin samarwa, gwaji da aunawa da ke da hankali ga rawar jiki. Kasa mai aiki ba zai iya samar da yanayin rawar jiki mai shiru da ake buƙata don waɗannan kayan aiki ba. Tsibirin kwanciyar hankali na TMC ya maye gurbin wani ɓangare na yankin ƙasa mai aiki da "tsibirin kwanciyar hankali" wanda aka kafa a ƙasa, yana ba da sabbin hanyoyin magance. Tsibirin Quiet ya haɗa da saman dandamali mai dacewa da ɗakin tsabta da tsarin tallafi na takamaiman aikace-aikace da filin.

kawar da vibration

Babban kayan tallafi na Quiet Island ** da fasahar da aka haɗa a cikin tsarin STACIS III mai aiki. Wannan "rigid" irin inertial damping goyon bayan tsarin ne mai kyau ga kowane rawar jiki m kayan aiki, yana ba da damar irin wannan kayan aiki ya yi aiki a ** high misali a cikin m yanayi. STACIS III ya dace da kayan aikin sarrafa kansa na wafer, kayan aikin daukar hoto na lantarki mai ƙuduri, kayan aikin milling na ion, da duk wani kayan aiki tare da tsarin sarrafa kansa na ciki mai aiki ko mai aiki (duba littafinmu na White Paper game da taro mai aiki a kan mai aiki mai aiki). Bugu da ƙari, yana ba da *** vibration isolation aiki a cikin kewayon m. Kuma "Hard Shigarwa" zane ne sosai wuya, don haka ga mafi girma, sama da ƙasa da haske kayan aiki, babu matsalar kwanciyar hankali.

Tubing da kuma bracket

An tsara shi ne ta hanyar ƙwarewar ƙungiyar injiniya ta TMC don tallafawa STACIS isolators, kuma an yi shi ne ta hanyar masana'antarmu ta ISO 9001 bisa ga ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun ƙayyadaddun. Kowane tsibirin Quiet an tsara shi da kyau don dacewa da tsawon ƙasa daban-daban, siffofin ƙasa na ƙasa da girman kayan aiki. TMC, wanda ya shigar da dubban na'urori a duk faɗin duniya don tallafawa nau'ikan kayan aiki daban-daban sama da 200, yana da ilimi da ƙwarewa don tsara tsarin tallafi don biyan bukatun STACIS da kayan aikinku.

Rigid dandamali

Wannan dandalin ya ƙunshi 4 inci (100mm) mai kauri na karfe wanda TMC ya tsara kuma ya ƙirƙira, wanda ke da karfe mai ƙarfi, wanda ba za a iya matsawa ba, wanda ke da ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfin ƙarfe. The layered sakamako a cikin wani seamless bakin karfe farantin da kuma core tare da epoxy resin haɗuwa samar da babban rigidity da tsarin damping. Babban cross section da karfe abun ciki samar da sosai high gaba daya rigidity. Sama da gefe ne a ci gaba da one-in-one bakin karfe gida don kiyaye tsabta, kyau da kuma mutunci. TMC na iya tsarawa da ƙirƙirar dandamali na musamman don aikace-aikace kamar yadda ake buƙata, gami da yanke, siffofi na musamman, ramuka masu tsayayye da ƙuduri.

Quiet Islands vs. Quiet Buildings

Designing a facility to meet the stringent Vibration Criteria of extremely precise imaging equipment can be very challenging, and often cost-prohibitive, particularly when not all tools in the facility require these very low vibration levels.[1]

Statistical representation (in terms of Mean plus Sigma Spectra) of vertical vibrations in a typical semiconductor fab production area at 'as built' and two times thereafter [2]

It is very difficult to isolate very large areas such as entire buildings, or an entire floor. It is also well documented that building vibration levels will increase relative to a design specification as the facility is populated with equipment and people. Repeated vibration measurements a few months, or a year later, show that floor vibration levels typically rise over time.[2]

The more cost effective and successful approach for achieving the stringent requirements of vibration sensitive tools, is to employ point-of use active vibration control with serial piezoelectric technology, particularly to mitigate challenging low frequency (less than 5 Hz) vibration (example here).

TMC can work with the your team to design a tool-specific Quiet Island solution. This process allows us to look at each tool specifically and provide the best performing solution. A building design incorporating one large concrete sub-floor “slab” with a “raised floor” allows for flexibility of tool selection post-construction. Replacing the raised floor with a Quiet Island only where needed provides the most sensitive tool set with a vibration environment an order of magnitude, at least, lower than the sub-floor.

See also The Benefits of Including Floor Vibration Control for Nano-Tech Facilities over Designing 'Quiet' Buildings article on AZO Nano.

1Evolving criteria for research facilities: I – Vibration, Colin Gordon Associates, SPIE Conference 5933: Buildings for Nanoscale Research and Beyond, 2005, Source

2Maturation of the Vibration Environment in Advanced Technology Facilities, Colin Gordon Associates, Journal of the IEST, V. 48, No. 1, 2005, Source

Amfanin Quiet Island

Yana amfani da fasahar daukar karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin karfin

Saurin sassauci na modularity, keɓaɓɓu da sake daidaitawa - Kowane dandamali an tsara shi ne bisa ga aikace-aikacen abokin ciniki, amma ba kamar dandamali na kankare ba, waɗannan dandamali za a iya sake daidaitawa da sauƙi idan kayan aiki ko halayen ƙasa suka canza.

Kwarewa - TMC yana da kwarewa mai yawa a cikin aiki tare da masana'antun semiconductor na **, cibiyoyin bincike na kimiyya da masu daidaitaccen OEM. Mun san abokan ciniki da bukatunsu. Mun tsara da kuma samar da kansa.

aiki

A kan tsibirin kwanciyar hankali mai tsayi na inci 24, inci 40 x inci 60, 4 STACIS bracket,
Ma'auna watsa yawa a karkashin VC-C shigarwa daga ƙasa

Bayani

Bayani na aiki

Isolator zane, girma, muhalli da kuma amfani da bukatun

DC-2020 mai kula bayanai

Sauran sigogi

SauranTsibirin Quiet

Manyan kayan aiki ba tare da ƙayyadaddun girgizar muhalli ba sau da yawa suna buƙatar ƙarfi mai ƙarfi da ƙarfi wanda ya rabu da ƙasa mai aiki. Rigid Quiet Island ne mafita mai kyau. Rigid Quiet Island yana da wannan saman dandamali mai inganci kuma ana iya tsara shi don ɗakunan tsabtace ƙasa masu aiki a kowane tsayi, kowane ƙasa mai ƙasa, da kuma girman kayan aiki daban-daban. TMC yana ba da nau'ikan ginshiƙai daban-daban don biyan buƙatu daban-daban don samar da mafita mai sassauƙa, mai sassauƙa da haɓaka don kayan aiki da masana'antu.

Aikace-aikacen Photos

Saboda shigarwa a mu Quiet Island ® rikitarwa, hankali da darajar kayan aiki a kan ƙasa dandali, ba mu halitta misali directory don yin odalamba.

Mun yi imanin cewa ya kamata a tsara kowane dandamali don takamaiman aikace-aikace. Matakai da aka ba da shawara don yin oda kamar haka:

▪ Ka gaya mana na'urar ko kayan aikin da kake so ka keɓe. Tun da mun shigar da dubban na'urori, muna iya samun tsarin dandamali wanda ya dace da bukatun aikace-aikacenku. Bugu da ƙari, muna da haɗin kai tare da masu ƙirƙirar kayan aiki, masu daidaitawa, SEM da sauran kayan aiki don haka muna fahimtar ** sabon girman girma, siffofi, canje-canje na nauyi da ƙayyadaddun ƙayyadaddun ƙasa.

▪ Ko kuma, za ka iya so wani dandamali da ya dace da aiki ƙasa grid tsarin. Abokan ciniki yawanci suna zaɓar dandamali mai inci 47 x 47 (1,190 x 1,190mm) don maye gurbin tiles na biyu.

▪ Ka gaya mana cewa aikinka yana da tsawo fiye da ƙasa mai ƙarfi.

▪ Da fatan za a kwatanta mu ko samar da wani zane da ke nuna wani rami tsari a kasa ko karfe beam / lattice geometry.

▪ Don Allah ka ba mu bayanan girgizar ƙasa ko tattauna da mu yadda za a tsara su don auna su.

▪ Ka yi la'akari da motsin jiki na kayan aiki. Our rigid, non-resonance ginshiƙi zane samar da cikakken tallafi ga da yawa kayan aiki. More m aikace-aikace za su bukaci iska ko piezoelectric goyon baya